Photomechanical Production Of Textured Or Patterned Surfaces, E.g. For Printing, For Processing Of Semiconductor Devices; Materials Therefor; Originals Therefor; Apparatus Specially Adapted Therefor;
G02B
Optical Elements, Systems Or Apparatus
G21K
Techniques For Handling Particles Or Ionising Radiation Not Otherwise Provided For; Irradiation Devices; Gamma Ray Or X-ray Microscopes
G01N
Investigating Or Analysing Materials By Determining Their Chemical Or Physical Properties
G01B
Measuring Length, Thickness Or Similar Linear Dimensions; Measuring Angles; Measuring Areas; Measuring Irregularities Of Surfaces Or Contours
